Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and ...

Defect detection requirements on the order of 10 defective parts per million (DPPM) are driving improvements in inspection tools’ resolution and throughput at foundries and OSATs. However, defects ...

Defect states refer to electronic energy levels that arise from imperfections or irregularities in the crystal structure of materials, particularly in semiconductors and insulators. These ...